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International Conferences

Title

Name of the conference

Year

Etch Characteristics of TiN Thin Films Masked with Nanometer-Sized Patterns

The 3rd USA International Conference on Surfaces, Coatings and NanoStructured Materials (NANOSMAT-USA)

2016

Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks Using Various Non-Corrosive Gas mixtures

The 3rd USA International Conference on Surfaces, Coatings and NanoStructured Materials (NANOSMAT-USA)

2016

Etching of Palladium thin films using C2H5OH/Argasmixture

The 3rd USA International Conference on Surfaces, Coatings and NanoStructured Materials (NANOSMAT-USA)

2016

Dry etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas Mixture

International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)

2015

Etch Characteristics of Ta Thin Films Using Halogen Containing Gas Mixtures in Inductively Coupled Plasma for Hard Mask Applications

International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)

2015

The Effect of C, H and O Elements on Etching Ru Thin Films using Inductively Coupled  

International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)

2015

Characterization of Zn(O,S) Buffer Layers for Cu(In,Ga)Se2 Solar Cells

Pacific Rim Symposium on Surfaces, Coatings & Interfaces 2014

2014

Inductively Coupled Plasma Reactive Ion Etching of CoFeB Thin Films Using a CH3COOH/Ar Gas Mixture  

Pacific Rim Symposium on Surfaces, Coatings & Interfaces 2014

2014

Etch Characteristics of Co2MnSi Thin Films in CH4/O2/Ar Plasmas

Pacific Rim Symposium on Surfaces, Coatings & Interfaces 2014

2014

Influence of Selenization Process on Cu(InxGa1-x)Se2 Absorber Layer Prepared

by RF Sputtering using Single Quaternary Target

International Conference on Microelectronics and Plasma Technology 2014 (ICMAP 2014)

2014

Characteristics of RF-sputtered CdS Buffer Layers for Cu(In,Ga)Se2 Solar Cells

International Conference on Microelectronics and Plasma Technology 2014 (ICMAP 2014)

2014

High density plasma reactive ion etching of Ru thin films using non-corrosive gas mixture

International Conference on Microelectronics and  Plasma Technology 2014 (ICMAP 2014)

2014

Inductive Couple Plasma Reactive Ion Etching Characteristics of TiO2 Thin

Films

International Conference on Microelectronics and  Plasma Technology 2014 (ICMAP 2014)

2014

Comparison of Etch Characteristics of CoFeB Magnetic Thin films Using CH3OH, CH4 and H2O Plasmas

The 35th International Symposium on Dry Process (DPS 2013)

2013

Influence of Post-treatment on Properties of CIGS Thin Films Deposited by RF Magnetron Sputtering using a Quaternary Single Target for Photovoltaic Devices

International Thin Films Conference (TACT 2013)

2013

Effect of H2O gas on Etch Characteristics of Magnetics Tunnel Junctions Stacks Using a H2O/CH3OH Plasma

The 35th International Symposium on Dry Process (DPS 2013)

2013

Sung Hee Jung, Chee Won Chung , “Characterization of multi-stacks CIGS thin films by RF magnetron sputtering using Cu(In1-xGax)Se2 single quaternary targets

 

Global Photovoltaic Conference 2013

2013.

Conformal contact printing of thin metal patterns

2013 Conference on Nanomaterials

2013.

Investigation on Etch Characteristics of MgO Thin Films Using a H2O/CH4/Ar Plasma

IUMRS-ICA 2012 (International Union of Materials Research Society - International Conference in Asia)

2012

Etch Characteristics of CoFeB Magnetic Thin Films Using High Density Plasma of a H2O/CH4/Ar Gas Mixture

IUMRS-ICA 2012 (International Union of Materials Research Society - International Conference in Asia).

2012

Electrical and structural properties of CIGS thin films deposited by RF magnetron sputtering using a Cu(In1-xGax)Se2 single target",

The 4th International Conference on Microelectronics and Plasma Technology (ICMAP)

2012

Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks Using a H2O/Ar Mixture

The 4th International Conference on Microelectronics and Plasma Technology (ICMAP)

2012

Investigation on Etch Characteristics of FePt Thin Films Using a H2O/Ar Plasma

The 4th International Conference on Microelectronics and Plasma Technology (ICMAP).

2012

Effect of Two-Step Deposition on CuInS2 Thin Films Prepared Using Aerosol Jet Deposition Method

The 4th International Conference on Microelectronics and Plasma Technology (ICMAP).

2012

Characterization of Copper Indium Gallium Selenide Thin Films Prepared by RF Magnetron Sputtering Using a Single Target

The third international conference on microelectronics and plasma technology (ICMAP)

2011

Structural and Optical Properties of CuInS2 Thin Films Prepared by Aerosol Jet Deposition

The third international conference on microelectronics and plasma technology (ICMAP)

2011

High Density Plasma Reactive Ion Etching of CoFeB Magnetic Thin Films Using a CH4/Ar Plasma

The third international conference on microelectronics and plasma technology (ICMAP)

2011

Inductively Coupled plasma Reactive Ion Etching of IrMn Magnetic Thin Films in a CH4/Ar gas

The third international conference on microelectronics and plasma technology (ICMAP)

2011

Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM

1st International Conference of Asian Union of Magnetic Societies (ICAUMS)

2010

Etch Characteristics of IrMn Thin Films Using an Inductively Coupled Plasma of CH3OH/Ar

1st International Conference of Asian Union of Magnetic Societies (ICAUMS)

2010

Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

1st International Conference of Asian Union of Magnetic Societies (ICAUMS)

2010

Investigation on Etch Characteristics of Nanometer-Sized Magnetic Tunnel Junction Stacks Using a HBr/Ar Plasma

10th International Conference on Nanotechnology and IEEE Nano

2010

Growth Mechanism of CdS Nano-Films Prepared by Chemical Bath Deposition

10th International Conference on Nanotechnology and IEEE Nano

2010

Investigation on Etch Characteristics of MgO thin films Using a HBr/Ar Plasma

10th Asia-Pacific Conference on Plasma Science and Technology (APCPST)

2010

Evolution of Etch Profile in Etching of CoFeB Thin Films Using High Density Plasma Reactive Ion Etching

10th Asia-Pacific Conference on Plasma Science and Technology (APCPST)

2010

Structural, Electrical and Optical Properties of Aluminum-Doped Zinc Oxide Thin Films Prepared by Magnetron Sputtering

10th Asia-Pacific Conference on Plasma Science and Technology (APCPST)

2010

Performance Improvement of Dye-Sensitized Solar Cell by Surface Patterning of FTO Transparent Electrode

19th International Photovoltaic Science and Engineering Conference and Exhibition (PVSEC)

2009

Characteristics of Indium Zinc Oxide Thin Films Prepared by Direct Current Magnetron Sputtering For Flexible Solar Cells

19th International Photovoltaic Science and Engineering Conference and Exhibition (PVSEC)

2009

Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films in Cl2/Ar Gas Mix

The 31th International Symposium on Dry Process (DPS)

2009

Performance Enhancement in Dye-Sensitized Solar Cells by Surface Modification of Transparent Conducting Oxide Electrode on Flexible Substrate

2nd International Conference on Microelectronics and Plasma Technology (ICMAP)

2009

Etch Characteristics of Gallium Indium Zinc Oxide Thin Films in a HBr/Ar Plasma

International Conference on Plasma Surface Engineering (AEPSE)

2009

Etch Characteristics of Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma of a Cl2/Ar gas

The 1st International Conference on Materials and Plasma Technology

2008

High Density Plasma Etching of Magnetic Tunnel Junction Stacks with Nanometer-Sized Pattern in a Cl2/Ar Gas Mix

The 1st International Conference on Materials and Plasma Technology

2008

The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma

The 1st International Symposium on Advanced Magnetic Materials

2007

Etch Characteristics of Magnetic Tunnel Junction Stack Using a High Density Plasma in a HBr/Ar Gas

The 1st International Symposium on Advanced Magnetic Materials

2007

Dry Etching of IZO Thin Films Using a HBr/Ar Plasma

14th International Symposium on Intercalation Compounds, Seoul, Korea.

2007

Preparation of flexible dye sensitized solar cell treated by UV irradiation with indium zinc oxide electrodes

The 2nd Korea-Japan Bilateral Workshop on Dye-sensitized and Oganic Solar Cells, KIST, Seoul, Korea

2007

Etch Characteristic of Gallium Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching in Chlorined Based Gases

The 29th International Symposium on Dry Process

2007

Effect of C2F6 Gas on Etch Profile of Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Gas Mixures

The 29th International Symposium on Dry Process

2007

Effect of Deposition Parameters on Properties of Indium Zinc Oxide Thin Films for Application to Flexible Dye Sensitized Solar Cell Prepared at Low Temperature

The 29th International Symposium on Dry Process

2007

Characteristics of Indium Zinc Oxide Thin Films Deposited by Radio Frequency Reactive Magnetron Sputtering for Solar Cells Application

Solid State Phenomena

2007

Dry Etching of Magnetic Tunnel Junction Stack Using a High Density Plasma of a Cl2/Ar Gas Mix

14th International Symposium on Intercalation Compounds, Seoul, Korea

2007

Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas

The 18th International Symposium on Integrated Ferroelectrics

2006

High Density Plasma Etching of IrRu Thin Films as a New Electrode for FeRAM

The 18th International Symposium on Integrated Ferroelectrics

2006

FABRICATION OF MAGNETIC TUNNEL JUNCTION STACK USING HIGH DENSITY PLASMA ETCHING IN Cl2/Ar AND BCl3/Ar GASES

The 18th International Symposium on Integrated Ferroelectrics

2006

Characteristics of Indium Zinc Oxide Thin films Deposited by Radio Frequency Reactive Magnetron Sputtering for Solar Cells Application

IUMRS-ICA 2006

2006

Etch Characteristics of Magnetic Tunnel Junction Stacks in a High Density Plasma Using Chlorine-based gases

IUMRS-ICA 2006

2006

Inductively Coupled Plasma Reactive Ion Etching of Titanium Nitride Thin Films in a Cl2/Ar Plasma

IUMRS-ICA 2006

2006

Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks with Nanometer-Sized Patterns for Magnetic Random Access Memory

The 28th International Symposium on Dry Process

2006

Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma

The 28th International Symposium on Dry Process

2006

Etch Characteristics of Nickel Oxide and Nickel Using Inductively Coupled Plasma Reactive Ion Etching for Oxide Resistive Random Access Memory (OxRRAM) Application

The 28th International Symposium on Dry Process

2006

Etch Characteristics of CoFeSiB Magnetic Films by Inductively Coupled Plasma Reactive Ion Etching for Magnetic Random Access Memory

The 17th International Symposium on Integrated Ferroelectrics

2005

Investigation on Etch Characteristics Of GeSbTe Thin Films for Phase-Change Memory

The 17th International Symposium on Integrated Ferroelectrics

2005

Electrical Characterization of Nickel Oxide Thin Films Deposited by Reactive Sputtering for Memory Application

The 17th International Symposium on Integrated Ferroelectrics

2005

Formation of Si Nanostructure by Dry Etching Using Self-Organized Metal Oxide Nanopillar Mask

The 17th International Symposium on Integrated Ferroelectrics

2005

Metal-Insulator Transitions In Polycrystalline VOx Thin Films

The 17th International Symposium on Integrated Ferroelectrics

2005

Synthesis of nanodot arrays using self-assembled niobium oxide nanopillar mask by reactive ion etching

The 4th Asia-Pacific Chemical Reaction Engineering Symposium

2005

Inductively coupled plasma reactive ion etching of Co2MnSi magnetic films for magnetic random access memory

The 4th Asia-Pacific Chemical Reaction Engineering Symposium

2005

HIGH DENSITY PLASMA ETCHING OF CoFeSiB MAGNETIC FILMS WITH HARD MASK

International Symposium on Spintronics and Advanced Magnetic Technologies and International Symposium on Magnetic Materials and Applications

2005

NANOMETER-SIZED ETCHING OF MAGNETIC TUNNEL JUNCTION STACK FOR MAGNETIC RANDOM ACCESS MEMORY

International Symposium on Spintronics and Advanced Magnetic Technologies and International Symposium on Magnetic Materials and Applications

2005

Nanometer-Sized Etching of Polysilicon Thin Films in a High Density Plasma

The 50th AVS International Symposium

2003

Etch characteristics of CoZrNb and CoFeTb magnetic films in a high density plasma

2003 International Symposium on Magnetic Materials

2003

Bi3.25La0.75Ti3O12 Thin Films Prepared on Pt/Ti/SiO2/Si(100) by Chemical Solution Deposition

APPChE

2003

Inductively Coupled Plasma Etching of Pb(ZrXTi1-X)O3 Thin Film in a HBr/Ar Plasma

Korea-Japan symposium

2002

Bi3.25La0.75Ti3O12 Thin Films Prepared on Pt/Ti/SiO2/Si(100) by Chemical Solution Deposition

APPChE, Sept., 2002, Christchurch, New Zealand

2002

Ferroelectric Emission Studies for Electron Emission Lithography Application

Proceedings of the 14th IEEE ISIF Vol. I

2001

Inductively Coupled Plasma Etching of Pb(ZrXTi1-x)O3 Thin Films in Cl2/C2F6/Ar and HBr/Ar Plasmas

Proceeding of JECS, USA

2001

Pt/PZT/TiO2 Gate Stack Etching by Using TiO2 Hard Mask for Metal-Ferroelectric-Insulator-Semiconductor FETs

198th International Electrochem. Soc. meeting

1999

Crystallization and Electrical Properties of Bi4Ti3O12 Films Derived from Bismuth Acetate and Bismuth Nitrate Precursor Solutions

MRS Symposium Proceedings, Fall Meeting, Vol 493

1998

Investigation of Etch profiles in etching of PZT and Pt thin films

MRS Symposium Proceedings, Fall Meeting, Vol 493

1998

Preparation and Characterization of PZT Thin Films on RuOX/Pt Multilayered Electrode by MOCVD

MRS Symposium Proceedings, Fall Meeting, Vol 446

1997

Dry Etching of Pt/Pb(ZrXTi1-X)O3/Pt Thin Film Capacitors in an Inductively Coupled Plasma (ICP) for Nonvolatile Semiconductor Memory Applications

Materials Research Society Symposium Proceedings, Fall Meeting, Vol 446

1997

Formation of Metal-Ferroelectric-Insulator-Semiconductor Structure for Single Transistor Memory

The 52nd Symp.on Semiconductors and IC Tech

1997

Characterization of Sol-Gel Precursor Solutions for the preparation of Pb(ZrXTi1-X)O3 Thin Films

Proceedings of '97 KIChE, Fall Meeting, Vol.3

1997

Fabrication of Ferroelectric Capacitors Using RuO2/Pt Electrode

Proceedings of the Tenth IEEE ISIF Vol. I,

1996

Reactive Ion Etching Damage to Ferroelectric Thin Films Capacitors

- MRS Symposium Proceedings, Fall Meeting, Vol 361

1995

The Characterization and Electrical Properties of Doped PZT Thin Films prepared by Sol-Gel Processing

MRS Symposium Proceedings, Fall Meeting, Vol 361

1995

Study on Multilayered Electrodes for Ferroelectric Thin Film Capacitors

MRS Symposium Proceedings, Fall Meeting, Vol 361

1995

Electrode Stress Effects on Electrical Properties of PZT Thin Film Capacitors

Proceedings of the Ninth IEEE ISIF,

1994


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