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XpressEngine

Equipment


Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE)

 

          

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 - Model : A-Tech ICPRIE

 - Amount : 1

 - Size / Gas : 6 inch wafer / CH3OH, CH4, H2O, Cl2, HBr, C2F6, O2, N2, He, Ar

 - Purchase date : 2005. 03.

 - Running state : Normal

 

 

※ RF Magnetron Sputtering System



 

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  - Model : A-Tech sputter

  - Amount : 1

  - Size / Gas : 4 inch wafer / N2, O2, Ar

  - Purchase date : 2007. 07.

  - Running state Normal



 

※ Plasma Etching System and Asher

 

          8049f00428efa2e7b8be06087147f292.jpg

 

  - Model : SHA-4D-250R

  - Amount : 1

  - Size / Gas : 6 inch wafer / C2F6, O2, Ar

  - Purchase date : 2003.03.

  - Running state : Normal

 

 

※ Aerosol Jet Etcher

 

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  - Model

  - Amount : 1

  - Size / Gas : 4 inch wafer / Ar

  - Purchase date : 2001. 05.

  - Running state : Normal

 

 

※ Surface profilometer

 

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  - Model : TENCOR P-1

  - Amount : 1

  - Size : 6 inch wafer

  - Purchase date : 2006. 11.

  - Running state : Normal

 

 

※ Furnace

 

          5b177c6b42d4682723bd03626cdb0341.jpg

 

  - Model : DS-KT-OT-120

  - Amount : 1

  - Size / Gas : 4 inch wafer / N2, O2, Ar

  - Purchase date : 2001. 01.

  - Running state : Normal

  

 

※ Optical Emission Spectroscopy (OES)

 

          maya2000proweb.jpg

 

  - Model : MAYA PRO 2000 (Ocean Optics)

  - Amount : 1

  - Purchase date : 2014. 01.

  - Running state : Normal

 

 

※ Spin coater

 

          4ab12e9a2583ce6bc19286b1bbe5a2e1.jpg

 

  - Model : SP-3000

  - Amount : 1

  - Size : 4 inch wafer /

  - Purchase date : 2001. 01.

  - Running state : Normal

 

 

Dry Oven

 

Microscope

 

Balance

 

Hot Plate

 

Sonicator

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Electronic Materials Processing Laboratory(2E-244)
Department of Chemical Engineering, Inha University
100 Inha-ro, Nam-gu, Incheon, Korea, 402-751
TEL: 032-860-7473 FAX: 032-872-0959