Patent Name

Developer

Patent Number

Country

Date

스퍼터링증착을이용한Zn(O, S)박막의제조방법

정지원,최지현

10-1662993

Republic of Korea

2016.09.29

호이슬러합금의식각방법{The method of etching of Heusler alloy materials}

정지원,아드리안,황수민

10-1588607-0000

Republic of Korea

2016. 01. 20

H₂O가스를이용한자성박막의식각방법{The method for etching of magnetic thin films using H₂O gas}

정지원,이일훈

10-1548232-0000

Republic of Korea

2015.08.24

스퍼터링증착을이용한황화카드뮴박막의제조방법{Preparation Method of CdS Thin Films Using Sputtering Deposition}

정지원,최지현

10-1540035-0000

Republic of Korea

2015.07.22

자기터널접합구조용건식식각방법및이를위한기화장치법{Dry etching method for Magnetic Tunnel Junction (MTJ) stack and vaporizing apparatus for the same}

정지원,이태영

10-1489740-0000

Republic of Korea

2015.01.29

MgO박막의건식식각방법{Dry Etching Method of MgO thin film}

정지원,이일훈

10-1394651-0000

Republic of Korea

2014. 05. 02

알칸계혼합가스를이용한자성박막의식각방법{The method for etching of magnetic thin films using alkanes mixture gas}

정지원,김은호,이태영

10-1314830-0000

Republic of Korea

2013. 09. 27

자기터널접합적층박막에대한건식식각방법{Dry Etching Method for Magnetic Tunnel Junction(MTJ) stack film

정지원,이태영

10-1312028-0000

Republic of Korea

2013. 09. 17.

자기터널접합구조에대한건식식각방법{Dry Etching Method for Magnetic Tunnel Junction(MTJ) stack}

정지원,김은호

10-1222190-0000

Republic of Korea

2013. 01. 08

에어로졸젯증착장치및이를이용한광흡수층의제조방법{Device of aerosol-jet deposition and fabrication method of absorber layer thereby}

정지원,김동찬,공선미,번영

10-1194651-0000

Republic of Korea

2012. 10. 19

자성박막의식각방법{The method of etching magnetic thin films}

정지원,소우빈

10-1171387-0000

Republic of Korea

2012. 07. 31

리프트오프공정에의해패턴이형성된투명전극및이를이용한태양전지{The patterned transparent electrode by lift-off and the solar cell using the same}

정지원,

10-1071412-0000

Republic of Korea

2011. 09. 30

인듐옥사이드-징크옥사이드의건식식각방법{Dry Etching Method for In₂O₃-ZnO}

정지원

10-2009-0905993

Republic of Korea

2009. 06. 26

상변화물질(GexSbyTez)에대한건식식각방법

정지원

10-0805844-0000

Republic of Korea

2008. 02. 14

산화아연물질에대한건식식각방법

정지원

10-0780832-0000

Republic of Korea

2007. 11. 23

상변화물질(GexSbyTez)에대한건식식각방법

정지원

10-0780404-0000

Republic of Korea

2007. 11. 22

TiN을상지층으로사용한자기저항소자

정지원,황순원,김태완,정석재,유용환

10-0695135-0000

Republic of Korea

2007. 03. 08

PZT박막의건식식각방법

정지원

10-0408497-0000

Republic of Korea

2003. 11. 24

백금박막의건식식각방법

정지원

10-0378345-0000

Republic of Korea

2003. 3. 18

저온공정을이용한PZT박막손상회복방법

정지원,김창정

10-0378344-0000

Republic of Korea

2003. 3. 18

이리듐전극의건식식각방법{Dry etching method of iridium electrode}

정지원

10-0338808-0000

Republic of Korea

2002. 5. 18

강유전체커패시터용의제조방법

정지원

10-0322695-0000

Republic of Korea

2002. 1. 17

강유전체커패시터용피지티(PZT)박막및이의제조방법

정지원,이완인,이준기,정일섭,유인경

10-0355802-0000

Republic of Korea

2002. 9. 25

강유전체커패시터의제조방법{Manufacture of semiconductor device}

정지원

10-0287118-0000

Republic of Korea

2001. 1. 19

Method for Fabricating a Ferroelectric Capacitor

Chung CheeWon, Il-sub Chung, In-kyung Yoo

6,048,737

U.S.A

2000. 11. 4

Method for Dry-Etching a Platinum Thin Film

Chee Won Chung

5,976,394

U.S.A

1999. 10. 2

Method for Manufacturing Ferroelectric Thin-Film Capacitor

Chee Won Chung

1002666

Nederland

1998. 12. 1

Method for Manufacturing Ferroelectric Thin-Film Capacitor

Chee Won Chung

5,658,820

U.S.A./

1997. 8. 19

PZT Thin Films for Ferroelectric Capacitor and Method for Preparing the Same

Chung Chee Won, Wan-in Lee, Jun-ki Lee, Ilsub Chung, and In-kyung Yoo,

5,625,529

U.S.A

1997. 4.29

강유전체커패시터의제조방법

Chung Chee Won, Il sub Chung, In kyung Yoo

2703206

Japan

1997. 10. 3